Experimental study on step characteristics of inchworm linear micro-actuator

Abstract Few studies have quantitatively analyzed the relationship among step distance, driving voltage, and frequency of inchworm linear microactuator, which cannot achieve accurate control micro-actuator. What’s more, parameter setting rule is not clear. In this paper, model studied through theoretical derivation experimental analysis. The conditions drive signal are analyzed, waveform modified to improve stability micro-driver prediction established by using non-linear Support Vector Machine (SVM) regression theory Gaussian radial basis kernel function verified experiments.